- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/02 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Details
Patent holdings for IPC class H01J 37/02
Total number of patents in this class: 305
10-year publication summary
|
35
|
32
|
21
|
35
|
23
|
17
|
22
|
20
|
20
|
9
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| ASML Netherlands B.V. | 6816 |
51 |
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
19 |
| Hitachi High-Tech Corporation | 4424 |
18 |
| FEI Company | 851 |
16 |
| Hermes Microvision Incorporated B.V. | 129 |
10 |
| Axcelis Technologies, Inc. | 429 |
9 |
| Applied Materials, Inc. | 16587 |
8 |
| NuFlare Technology, Inc. | 770 |
8 |
| Hitachi High-Tech Science Corporation | 326 |
6 |
| Tokyo Electron Limited | 11599 |
6 |
| Lam Research Corporation | 4775 |
6 |
| Carl Zeiss SMT GmbH | 2646 |
5 |
| Carl Zeiss Microscopy GmbH | 1146 |
5 |
| Applied Materials Israel, Ltd. | 549 |
4 |
| Howard Hughes Medical Institute | 202 |
4 |
| KLA Corporation | 1223 |
4 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 149 |
3 |
| JEOL Ltd. | 556 |
3 |
| KLA-Tencor Corporation | 2574 |
3 |
| Oxford Instruments NanoTechnology Tools Limited | 145 |
3 |
| Other owners | 114 |